Optical deflector

A first element substrate (20a) including an interlayer insulating layer (15a) provided on a first transparent substrate (10a), a plurality of first transparent electrode (16) extending parallel to each other, each first transparent electrode (16) being provided at a bottom (B) of an associated one...

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Bibliographische Detailangaben
1. Verfasser: KANBAYASHI YUUICHI
Format: Patent
Sprache:eng
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Zusammenfassung:A first element substrate (20a) including an interlayer insulating layer (15a) provided on a first transparent substrate (10a), a plurality of first transparent electrode (16) extending parallel to each other, each first transparent electrode (16) being provided at a bottom (B) of an associated one of a plurality of grooves (S) in the interlayer insulating layer (15a), and a planarizing layer (17) covering the first transparent electrodes (16), filling the grooves (S), and having a refractive index equal to a refractive index of the interlayer insulating layer (15a), a second element substrate (30a) including a second transparent electrode (21) provided on a second transparent substrate (10b), and a liquid crystal layer (40) provided between the first element substrate (20a) and the second element substrate (30a) are provided.