Method of manufacturing microneedle

The invention discloses a method of manufacturing a microneedle including the steps of forming an island etching mask having thickness distribution on a substrate, and processing the substrate into a needle by taking advantage of a difference in etching rates between the etching mask and the substra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KUROSU TOSHIAKI, SHIOMITSU KAZUHIKO, SUZUKI GAKU, SUGIMURA HIROSHI, TOMONO TAKAO
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:The invention discloses a method of manufacturing a microneedle including the steps of forming an island etching mask having thickness distribution on a substrate, and processing the substrate into a needle by taking advantage of a difference in etching rates between the etching mask and the substrate. The invention enables to readily control a point angle and height of the manufactured needle.