Power switching device and method of manufacturing the same

A power switching device includes a channel forming layer on a substrate which includes a 2-dimensional electron gas (2DEG), and a channel supply layer which corresponds to the 2DEG at the channel forming layer. A cathode is coupled to a first end of the channel supply layer and an anode is coupled...

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Bibliographische Detailangaben
Hauptverfasser: JEON WOOUL, PARK KI-YEOL, SHIN JAI-KWANG, PARK YOUNG-HWAN, OH JAE-JOON
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A power switching device includes a channel forming layer on a substrate which includes a 2-dimensional electron gas (2DEG), and a channel supply layer which corresponds to the 2DEG at the channel forming layer. A cathode is coupled to a first end of the channel supply layer and an anode is coupled to a second end of the channel supply layer. The channel forming layer further includes a plurality of depletion areas arranged in a pattern, and portions of the channel forming layer between the plurality of depletion areas are non-depletion areas.