Atomic force microscopy controller and method

A method for determining a loop response for an apparatus for an atomic force microscope is disclosed. The method comprises: determining a loop response for an on-surface movement of a cantilever over a frequency range; determining a loop response for an off-surface movement of the cantilever over t...

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Bibliographische Detailangaben
1. Verfasser:	MOON CHRISTOPHER RYAN
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A method for determining a loop response for an apparatus for an atomic force microscope is disclosed. The method comprises: determining a loop response for an on-surface movement of a cantilever over a frequency range; determining a loop response for an off-surface movement of the cantilever over the frequency range; and adjusting an output of the controller at a frequency based on the loop response for the off-surface movement. An atomic force microscopy system is disclosed.