Retaining ring with attachable segments

Retaining ring with attachable segments

A retaining ring includes a generally annular upper portion having a top surface configured to be connected to a base of a carrier head and a lower surface, and a plurality of substantially identical arcuate segments detachably secured to the upper portion to form an annular lower portion. Each of t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MEYER STACY, GOPALAKRISHNAN PADMA, BHATNAGAR ASHISH, PAIK YOUNG J, MARTIN DANIEL, PALATY ABRAHAM, RAHMATHULLAH IRFANULLA KHUDDUS, VANSANTHA BOPANNA ICHETTIRA, RAVI ASWATHNARAYANAIAH
Format: Patent
Sprache:eng
Schlagworte:
DRESSING OR CONDITIONING OF ABRADING SURFACES
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
PERFORMING OPERATIONS
POLISHING
TRANSPORTING
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Beschreibung
Zusammenfassung:A retaining ring includes a generally annular upper portion having a top surface configured to be connected to a base of a carrier head and a lower surface, and a plurality of substantially identical arcuate segments detachably secured to the upper portion to form an annular lower portion. Each of the arcuate segments has an upper surface that abuts the lower surface of the upper portion and a bottom surface for contacting a polishing pad during polishing.