Method of manufacturing an electrical resonator

An electrical resonator comprises a substrate comprising a cavity. The electrical resonator comprises a resonator stack suspended over the cavity. The resonator stack comprises a first electrode; a second electrode; a piezoelectric layer; and a temperature compensating layer comprising borosilicate...

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Bibliographische Detailangaben
Hauptverfasser:	ROGERS CARRIE A, GRANNEN KEVIN J, CHOY JOHN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS RESONATORS
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Beschreibung
Zusammenfassung:	An electrical resonator comprises a substrate comprising a cavity. The electrical resonator comprises a resonator stack suspended over the cavity. The resonator stack comprises a first electrode; a second electrode; a piezoelectric layer; and a temperature compensating layer comprising borosilicate glass (BSG).