IGBT with emitter electrode electrically connected with an impurity zone

An IGBT includes a semiconductor portion with IGBT cells. Each IGBT cell includes a source zone of a first conductivity type, a body zone of a second, complementary conductivity type, and a drift zone of the first conductivity type separated from the source zone by the body zone. An emitter electrod...

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Bibliographische Detailangaben
Hauptverfasser: WERBER DOROTHEA, PFIRSCH FRANK, PLAPPERT MATHIAS, GUTT THOMAS
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An IGBT includes a semiconductor portion with IGBT cells. Each IGBT cell includes a source zone of a first conductivity type, a body zone of a second, complementary conductivity type, and a drift zone of the first conductivity type separated from the source zone by the body zone. An emitter electrode includes a main layer and an interface layer. The interface layer directly adjoins at least one of the body zone and a supplementary zone of the second conductivity type. A contact resistance between the semiconductor portion and the interface layer is higher than between the semiconductor portion and a material of the main layer. For example, the interface layer may reduce diode emitter efficiency and reverse recovery losses in IGBTs.