Metal coating for indium bump bonding

A process of making efficient metal bump bonding with relative low temperature, preferably lower than the melting point of Indium, is described. To obtaining a lower processing temperature (preferred embodiments have a melting point of

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Bibliographische Detailangaben
Hauptverfasser: LEE NINGNG, CHEN SIHAI
Format: Patent
Sprache:eng
Schlagworte:
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Zusammenfassung:A process of making efficient metal bump bonding with relative low temperature, preferably lower than the melting point of Indium, is described. To obtaining a lower processing temperature (preferred embodiments have a melting point of