Method of depositing and electrically conductive titanium oxide coating
A method of depositing an electrically conductive titanium oxide coating on a glass substrate, preferably by atmospheric chemical vapor deposition in a float glass manufacturing process, utilizes a precursor gas mixture including a halogenated, inorganic titanium compound, an organic oxygen containi...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method of depositing an electrically conductive titanium oxide coating on a glass substrate, preferably by atmospheric chemical vapor deposition in a float glass manufacturing process, utilizes a precursor gas mixture including a halogenated, inorganic titanium compound, an organic oxygen containing compound, a reducing gas and one or more inert carrier gases. |
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