Surrounding gate transistor (SGT) structure

The semiconductor device according to the present invention is an nMOS SGT and is composed of a first n+ type silicon layer, a first gate electrode containing metal and a second n+ type silicon layer arranged on the surface of a first columnar silicon layer positioned vertically on a first planar si...

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Bibliographische Detailangaben
Hauptverfasser: LI YISUO, ARAI SHINTARO, SINGH NAVAB, NAKAMURA HIROKI, JIANG YU, SHEN NANSHENG, KUDO TOMOHIKO, CHEN ZHIXIAN, BLIZNETSOV VLADIMIR, BUDDHARAJU KAVITHA DEVI, LI XIANG, MASUOKA FUJIO, CHUI KING-JIEN
Format: Patent
Sprache:eng
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Zusammenfassung:The semiconductor device according to the present invention is an nMOS SGT and is composed of a first n+ type silicon layer, a first gate electrode containing metal and a second n+ type silicon layer arranged on the surface of a first columnar silicon layer positioned vertically on a first planar silicon layer. Furthermore, a first insulating film is positioned between the first gate electrode and the first planar silicon layer, and a second insulating film is positioned on the top surface of the first gate electrode. In addition, the first gate electrode containing metal is surrounded by the first n+ type silicon layer, the second n+ type silicon layer, the first insulating film and the second insulating film.