Scan method

In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

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Bibliographische Detailangaben
1. Verfasser:	WARD BILLY W
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION
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Beschreibung
Zusammenfassung:	In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.