High-precision oscillator

A high-precision oscillator includes a voltage reference module which includes multiple measured Field Effect Transistors and arranged for detecting process corners for the measured Field Effect Transistors to generate a reference voltage containing process corner information of the measured Field Effect Transistors, a compensation current generating module which is arranged for receiving the reference voltage, making a temperature compensation for the reference voltage, and generating a compensation current which includes both the process compensation and temperature compensation, and a ring oscillator which is arranged for receiving the compensation current and outputting a clock with stable frequency. The high-precision oscillator designs the process compensation and the temperature compensation separately, which are adjustable due to one of them will not be influenced by the other; and frequency of its outputted clock is not influenced by process and temperature, thereby precision of the outputted clock is improved.