Phase difference detector, phase difference detection program, and plasma processing system using the phase difference detector

A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference r(= 2− 1) between two detected voltages v1 (phase angle: 1) and v2 (phase angle: 2). The phase difference computat...

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Bibliographische Detailangaben
Hauptverfasser:	KASAI YOSHINOBU, YOSHIZAKO YUJI, KITANO TOYOKAZU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TESTING
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Beschreibung
Zusammenfassung:	A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference r(= 2− 1) between two detected voltages v1 (phase angle: 1) and v2 (phase angle: 2). The phase difference computation unit uses a sine wave vs and a cosine wave vc generated separately and having the same frequency as the fundamental frequency of the voltages v1 and v2, to perform computation of v2s=v2×vs, v2c=v2×vc, v1s=v1×vs, v1c=v1×vc, and then extracts DC components I2=(−A2/2)·sin( 2), R2=(A2/2)·cos( 2), I1=(−A1/2)·sin( 1), R1=(A1/2)·cos( 1) at low-pass filters. The phase difference computation unit computes R3=R1×R2+I1×I2 at a complex multiplying unit to obtain R3=(A1·A2/4)·cos( r), computes I3=R2×I1−R1×I2 to obtain I3=(A1·A2/4)·sin( r), and computes r=tan−1(I3/R3) at the arctangent calculation unit, thereby obtaining the phase difference r.