Endpoint determination for capillary-assisted flow control
Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The...
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| creator | DESPRES JOSEPH R AVILA ANTHONY M WODJENSKI MICHAEL J BAUM THOMAS H SWEENEY JOSEPH D |
| description | Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US9109755B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US9109755B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US9109755B23</originalsourceid><addsrcrecordid>eNrjZLByzUspyM_MK1FISS1JLcrNzEssyczPU0jLL1JITizIzMlJLKrUTSwuziwuSU1RSMvJL1dIzs8rKcrP4WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHBloYGluampk5GxkQoAQB2oi-d</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Endpoint determination for capillary-assisted flow control</title><source>esp@cenet</source><creator>DESPRES JOSEPH R ; AVILA ANTHONY M ; WODJENSKI MICHAEL J ; BAUM THOMAS H ; SWEENEY JOSEPH D</creator><creatorcontrib>DESPRES JOSEPH R ; AVILA ANTHONY M ; WODJENSKI MICHAEL J ; BAUM THOMAS H ; SWEENEY JOSEPH D</creatorcontrib><description>Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; BLASTING ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HEATING ; LIGHTING ; MECHANICAL ENGINEERING ; PIPE-LINE SYSTEMS ; PIPE-LINES ; SEMICONDUCTOR DEVICES ; STORING OF DISTRIBUTING GASES OR LIQUIDS ; WEAPONS</subject><creationdate>2015</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150818&DB=EPODOC&CC=US&NR=9109755B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,781,886,25569,76552</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20150818&DB=EPODOC&CC=US&NR=9109755B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>DESPRES JOSEPH R</creatorcontrib><creatorcontrib>AVILA ANTHONY M</creatorcontrib><creatorcontrib>WODJENSKI MICHAEL J</creatorcontrib><creatorcontrib>BAUM THOMAS H</creatorcontrib><creatorcontrib>SWEENEY JOSEPH D</creatorcontrib><title>Endpoint determination for capillary-assisted flow control</title><description>Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>BLASTING</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HEATING</subject><subject>LIGHTING</subject><subject>MECHANICAL ENGINEERING</subject><subject>PIPE-LINE SYSTEMS</subject><subject>PIPE-LINES</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>STORING OF DISTRIBUTING GASES OR LIQUIDS</subject><subject>WEAPONS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLByzUspyM_MK1FISS1JLcrNzEssyczPU0jLL1JITizIzMlJLKrUTSwuziwuSU1RSMvJL1dIzs8rKcrP4WFgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8aHBloYGluampk5GxkQoAQB2oi-d</recordid><startdate>20150818</startdate><enddate>20150818</enddate><creator>DESPRES JOSEPH R</creator><creator>AVILA ANTHONY M</creator><creator>WODJENSKI MICHAEL J</creator><creator>BAUM THOMAS H</creator><creator>SWEENEY JOSEPH D</creator><scope>EVB</scope></search><sort><creationdate>20150818</creationdate><title>Endpoint determination for capillary-assisted flow control</title><author>DESPRES JOSEPH R ; AVILA ANTHONY M ; WODJENSKI MICHAEL J ; BAUM THOMAS H ; SWEENEY JOSEPH D</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US9109755B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2015</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>BLASTING</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HEATING</topic><topic>LIGHTING</topic><topic>MECHANICAL ENGINEERING</topic><topic>PIPE-LINE SYSTEMS</topic><topic>PIPE-LINES</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>STORING OF DISTRIBUTING GASES OR LIQUIDS</topic><topic>WEAPONS</topic><toplevel>online_resources</toplevel><creatorcontrib>DESPRES JOSEPH R</creatorcontrib><creatorcontrib>AVILA ANTHONY M</creatorcontrib><creatorcontrib>WODJENSKI MICHAEL J</creatorcontrib><creatorcontrib>BAUM THOMAS H</creatorcontrib><creatorcontrib>SWEENEY JOSEPH D</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>DESPRES JOSEPH R</au><au>AVILA ANTHONY M</au><au>WODJENSKI MICHAEL J</au><au>BAUM THOMAS H</au><au>SWEENEY JOSEPH D</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Endpoint determination for capillary-assisted flow control</title><date>2015-08-18</date><risdate>2015</risdate><abstract>Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS BLASTING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING PIPE-LINE SYSTEMS PIPE-LINES SEMICONDUCTOR DEVICES STORING OF DISTRIBUTING GASES OR LIQUIDS WEAPONS |
| title | Endpoint determination for capillary-assisted flow control |
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