Endpoint determination for capillary-assisted flow control

Endpoint determination for capillary-assisted flow control

Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DESPRES JOSEPH R, AVILA ANTHONY M, WODJENSKI MICHAEL J, BAUM THOMAS H, SWEENEY JOSEPH D
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
BLASTING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HEATING
LIGHTING
MECHANICAL ENGINEERING
PIPE-LINE SYSTEMS
PIPE-LINES
SEMICONDUCTOR DEVICES
STORING OF DISTRIBUTING GASES OR LIQUIDS
WEAPONS
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Beschreibung
Zusammenfassung:Apparatus and method for determining endpoint of a fluid supply vessel in which fluid flow is controlled through a flow passage disposed in an interior volume of the fluid supply vessel with a static flow restricting device and a selectively actuatable valve element upon establishing fluid flow. The endpoint determination can be employed to terminate fluid supply from the fluid supply vessel and/or to switch from a fluid-depleted supply vessel to a fresh vessel for continuity or renewal of fluid supply operation. The apparatus and method are suitable for use with fluidutilizing apparatus such as ion implanters.