Microactuator using bubble growth and destruction

Disclosed is a microactuator using growth and destruction of bubbles including a first chamber provided with a heating plate installed at an exterior of a bottom surface of the first chamber to generate heat, and filled with a first liquid working fluid such that bubbles are caused, by heat, to grow...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHUN WON-PYO, LEE KYE-JUNG, KIM SUNG-IL, PARK KI-HO
Format: Patent
Sprache:eng
Schlagworte:
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