Methods, systems, and articles of manufacture for implementing multiple-patterning-aware design rule check for electronic designs

Disclosed are methods, systems, and articles of manufactures for implementing multiple-patterning-aware design rule check for an electronic design. Various embodiments identify one or more sets of multiple-exposure grids and identify or generate a data structure by using the one or more sets of grid...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GEROUSIS VASSILIOS, ZHANG SHUO
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING PHYSICS
Online-Zugang:	Volltext bestellen
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