Resonator electrode material excellent in aging property, piezoelectric resonator using the same material, and sputtering target made of the same material

An electrode material capable of making more satisfactory the dispersion at the time of production and the aging property of a resonator than Au and capable of reducing the price as compared to Au. An resonator electrode material including a ternary alloy composed of Au and two metals M1 and M2, and...

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Hauptverfasser: UEKI KENICHI, KURITA MASAAKI, TERUI TAKASHI, OGASHIWA TOSHINORI, SAGAE TAKEYUKI, TAKEDA SHOHEI, AKANE KATSUNORI, OKAMOTO KENZO
Format: Patent
Sprache:eng
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Zusammenfassung:An electrode material capable of making more satisfactory the dispersion at the time of production and the aging property of a resonator than Au and capable of reducing the price as compared to Au. An resonator electrode material including a ternary alloy composed of Au and two metals M1 and M2, and being used as an excitation electrode to excite oscillation in a piezoelectric element, wherein the two metals M1 and M2 are, respectively, (a) metal M1: a metal exhibiting a tendency to decrease the temporal frequency property ( f1/f1) from the reference value f1, and (b) metal M2: a metal exhibiting a tendency to increase the temporal frequency property ( f1/f1) from the reference value f1. The metal M1 is preferably at least any one of Ag, Al and Ni, and the metal M2 is preferably at least any one of Pd, Ru, Pt, Ir, Rh and Cu.