Adiabatic mode-profile conversion by selective oxidation for photonic integrated circuit

Adiabatic mode-profile conversion by selective oxidation for photonic integrated circuit

Waveguide designs and fabrication methods provide adiabatic waveguide eigen mode conversion and can be applied to monolithic vertical integration of active and passive elements in PICs. An advantage of the designs and methods is a simple fabrication procedure with only a single etching step in combi...

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Bibliographische Detailangaben
Hauptverfasser: GUBENKO ALEXEY, WOJCIK GREG, MIKHRIN SERGEY, KRESTNIKOV IGOR, LIVSHITS DANIIL, KOVSH ALEXEY
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:Waveguide designs and fabrication methods provide adiabatic waveguide eigen mode conversion and can be applied to monolithic vertical integration of active and passive elements in PICs. An advantage of the designs and methods is a simple fabrication procedure with only a single etching step in combination with subsequent well-controllable selective oxidation. As a result, improved manufacturability and reliability can be achieved.