Multi-surface optical 3D microscope

A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two...

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Bibliographische Detailangaben
Hauptverfasser: KUDINAR RUSMIN, XU JAMES JIANGUO, LEE KEN KINSUN, SOETARMAN RONNY, GARLAND BEN, VELIDANDLA VAMSI MOHAN, HOU ZHEN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.