Tri-axis accelerometer having a single proof mass and fully differential output signals

Tri-axis accelerometer having a single proof mass and fully differential output signals

A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: METZ MATTHIAS, ULM MARKUS, PAN ZHIYU, LANG CHRISTOPH, YAMA GARY
Format: Patent
Sprache:eng
Schlagworte:
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.