Charged particle source with light monitoring for tip temperature determination

Charged particle source with light monitoring for tip temperature determination

Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PERCIVAL RANDALL G, BARRISS LOUISE, DIMANNA MARK D, NOTTE, IV JOHN, MELLO RUSSELL, RAHMAN MILTON
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CONTROLLING
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
PHYSICS
REGULATING
SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Beschreibung
Zusammenfassung:Systems and methods for heating an apex of a tip of a charged particle source are disclosed. The charged particle source can be, for example, a gas ion source. The systems can include a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.