Film thickness measurement apparatus and film thickness measurement method

A film thickness measurement apparatus includes: an ECT sensor for measuring a film thickness of a thermal barrier coating formed on a turbine blade; a storage unit for storing a measurement point on the turbine blade which is a point where the film thickness of the thermal barrier coating is measur...

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Bibliographische Detailangaben
Hauptverfasser: SHIOTANI SHIGETOSHI, KUROKAWA MASAAKI, KENMOTSU KEIICHI, YASUI JUN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A film thickness measurement apparatus includes: an ECT sensor for measuring a film thickness of a thermal barrier coating formed on a turbine blade; a storage unit for storing a measurement point on the turbine blade which is a point where the film thickness of the thermal barrier coating is measured; a laser displacement meter for measuring a shape of the turbine blade; a measurement position calculation unit for calculating an actual measurement point suitable for actual film thickness measurement using the ECT sensor, based on the shape of the turbine blade measured by the laser displacement meter and the measurement point on the turbine blade stored in the storage unit; and an arm drive unit for driving the ECT sensor to adjust a measurement position of the ECT sensor based on the actual measurement point calculated by the measurement position calculation unit.