X-ray composite apparatus

There is provided an X-ray composite apparatus capable of performing, with one unit, X-ray CT and element analysis by fluorescent X-rays. The X-ray composite apparatus 100 includes an X-ray source 110 generating cone beam X-rays, a sample support 150 holding a sample S, collimator parts 130 and 140...

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Bibliographische Detailangaben
Hauptverfasser:	AKIYAMA KIYOSHI, HARA YUKIHIRO, SASAKI KATSUNARI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	There is provided an X-ray composite apparatus capable of performing, with one unit, X-ray CT and element analysis by fluorescent X-rays. The X-ray composite apparatus 100 includes an X-ray source 110 generating cone beam X-rays, a sample support 150 holding a sample S, collimator parts 130 and 140 capable of narrowing the cone beam X-rays to form parallel X-rays, depending on the intended use, between the X-ray source and the sample support 150, a two-dimensional detector 170 detecting the cone beam X-rays transmitted through the sample S, and a fluorescent X-ray detector 176 detecting fluorescent X-rays radiated from the sample S, and when the apparatus is used for X-ray CT, the apparatus irradiates the sample with the cone beam X-rays, while when the apparatus is used for fluorescent X-ray analysis, the apparatus irradiates the sample S with the parallel X-rays.