External force detecting device and external force detecting sensor

A device is provided for a detecting external force applied to piezoelectric piece. A crystal piece is cantilever-supported in a container. Excitation electrodes are formed on an upper face and lower face, respectively. A movable electrode, connected via a lead-out electrode to the excitation electr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MUTOH TAKERU, ICHIKAWA RYOICHI, AMANO YOSHIAKI, KOYAMA MITSUAKI, IWAI HIROKI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A device is provided for a detecting external force applied to piezoelectric piece. A crystal piece is cantilever-supported in a container. Excitation electrodes are formed on an upper face and lower face, respectively. A movable electrode, connected via a lead-out electrode to the excitation electrode, is formed on the lower face side at a front end of the crystal piece. A fixed electrode is provided on a bottom portion of the container to face this movable electrode. The excitation electrode on the upper face side and the fixed electrode are connected to an oscillation circuit. When the crystal piece bends in response to an applied external force, capacitance between the movable electrode and fixed electrode, changes. This capacitance change results in a corresponding change in oscillation frequency of the crystal piece.