Magnetic recording media with small grain size and narrow c-axis dispersion by using dual seed layer with substrate bias

Media may be produced with narrow c-axis dispersion while having small grain size and high grain density. A dual seed layer design and a substrate bias voltage may be applied during deposition of the seed layer are used in the media. In some embodiments, the first seed layer is an amorphous material...

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Hauptverfasser: YAMASHITA TSUTOMU T, LI TUQIANG, STAFFORD DONALD C, MALHOTRA SUDHIR S
Format: Patent
Sprache:eng
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Zusammenfassung:Media may be produced with narrow c-axis dispersion while having small grain size and high grain density. A dual seed layer design and a substrate bias voltage may be applied during deposition of the seed layer are used in the media. In some embodiments, the first seed layer is an amorphous material because of a high content of elements with large atomic sizes. Application of the substrate bias during deposition of the second seed layer may reduce the grain size and may narrow c-axis dispersion.