Actuator arrangement for active vibration isolation comprising an inertial reference mass

Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) relative to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means...

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Hauptverfasser: RUIJL THEO ANGES MARIA, RIJS ROBERTUS MATHIJS GERARDUS, MULLER JOHANNES CORNELIUS ANTONIUS, VERVOORDELDONK MICHAEL JOHANNES
Format: Patent
Sprache:eng
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Zusammenfassung:Actuator arrangement with an actuator (8), a reference mass (22), a spring (24) and a first sensor (26; 42, 43; 32, 36). The actuator (8) applies a force between a first object (2) relative to a second object (16; 54). The reference mass (22) is, in use, supported by a third object (16; 56) by means of the spring (24). The first sensor (26; 42, 43; 32, 36) generates a first distance signal that depends on a first distance (z2; z5,z6; z3,z4) between the reference mass (22) and the first object (2) and is provided to a controller (6) to actuate the actuator (8).