Vacuum actuator including a stator forming a part of a vacuum partition wall

A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WATANABE KAZUHITO, MANO HIDEO, TASHIRO YUKIHITO, NOZAWA NAOYUKI, KOBINATA DAISUKE
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other.