Contaminate detection and substrate cleaning

Detection of periodically repeating nanovoids is indicative of levels of substrate contamination and may aid in reduction of contaminants on substrates. Systems and methods for detecting nanovoids, in addition to, systems and methods for cleaning and/or maintaining cleanliness of substrates are desc...

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Bibliographische Detailangaben
Hauptverfasser: KHUSNATDINOV NIYAZ, LABRAKE DWAYNE L
Format: Patent
Sprache:eng
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Zusammenfassung:Detection of periodically repeating nanovoids is indicative of levels of substrate contamination and may aid in reduction of contaminants on substrates. Systems and methods for detecting nanovoids, in addition to, systems and methods for cleaning and/or maintaining cleanliness of substrates are described.