Multiple sheath multiple capillary aerosol jet

Apparatus and method for depositing aerosolized material, wherein an aerosol flow is surrounded and focused by more than one consecutive sheath gas flows. The combined sheath and aerosol flows may consecutively flow through more than one capillary, thereby narrowing the flow further. Linewidths of l...

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Bibliographische Detailangaben
Hauptverfasser: ESSIEN MARCELINO, KING BRUCE H
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Apparatus and method for depositing aerosolized material, wherein an aerosol flow is surrounded and focused by more than one consecutive sheath gas flows. The combined sheath and aerosol flows may consecutively flow through more than one capillary, thereby narrowing the flow further. Linewidths of less than one micron may be achieved.