Observation method and observation device

With respect to a charged particle beam device, the step size of focal point measure for executing autofocusing is optimized to a value that is optimal with respect to the spread of an approximation curve for a focal point measure distribution. The step size of focal point measure for executing auto...

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Bibliographische Detailangaben
Hauptverfasser:	OBARA KENJI, BAN NAOMA
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CALCULATING CINEMATOGRAPHY COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY ELECTROGRAPHY HANDLING RECORD CARRIERS HOLOGRAPHY PHOTOGRAPHY PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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Beschreibung
Zusammenfassung:	With respect to a charged particle beam device, the step size of focal point measure for executing autofocusing is optimized to a value that is optimal with respect to the spread of an approximation curve for a focal point measure distribution. The step size of focal point measure for executing autofocusing is corrected using an image feature obtained based on a layout image derived from an image obtained at a first magnification or from design data. Autofocusing is executed based on the obtained step size to carry out observation, measurement, or to image the sample under inspection.