Systems and methods for packaging integrated circuit gas sensor systems

Systems and methods are provided for packaging integrated circuit (IC) gas sensor systems that employ at least one gas sensor that is formed as part of an integrated circuit and configured to sense the presence and/or concentration of a target gas or other gas characteristics that may be present in...

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Bibliographische Detailangaben
Hauptverfasser: PAVELKA JOHN, SPEER RAYMOND, SMITH PETER, CAVANAGH LEON
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Systems and methods are provided for packaging integrated circuit (IC) gas sensor systems that employ at least one gas sensor that is formed as part of an integrated circuit and configured to sense the presence and/or concentration of a target gas or other gas characteristics that may be present in the ambient gaseous environment surrounding the packaged IC gas sensor system.