Sapphire substrate having triangular projections with outer perimeter formed of continuous curve

A sapphire substrate having a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device comprises a plurality of projections on the principal surface. Each of the projections has a bottom that has a substantially polygonal shape. Each side of the bot...

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Hauptverfasser: OKADA TAKUYA, KADAN KATSUYOSHI, NARITA JUNYA, SAKO NAOYA, WAKAI YOHEI, INOUE YOSHIKI
Format: Patent
Sprache:eng
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Zusammenfassung:A sapphire substrate having a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device comprises a plurality of projections on the principal surface. Each of the projections has a bottom that has a substantially polygonal shape. Each side of the bottom of the projections has a depression in its center. Vertexes of the bottoms of the respective projections extend in a direction that is within a range of ±10 degrees of a direction that is rotated clockwise by 30 degrees from a crystal axis "a" of the sapphire substrate.