Technique for forming a passivation layer without a terminal metal

By determining at least one surface characteristic of a passivation layer stack used for forming a bump structure, the situation after the deposition and patterning of a terminal metal layer stack may be "simulated," thereby providing the potential for using well-established bump manufactu...

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Hauptverfasser: LEHR MATTHIAS, LETZ TOBIAS, HOHAGE JOERG, KUECHENMEISTER FRANK
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creator LEHR MATTHIAS
LETZ TOBIAS
HOHAGE JOERG
KUECHENMEISTER FRANK
description By determining at least one surface characteristic of a passivation layer stack used for forming a bump structure, the situation after the deposition and patterning of a terminal metal layer stack may be "simulated," thereby providing the potential for using well-established bump manufacturing techniques while nevertheless significantly reducing process complexity by omitting the deposition and patterning of the terminal metal layer stack.
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subjects BASIC ELECTRIC ELEMENTS
BEER
BIOCHEMISTRY
CHEMISTRY
COMPOSITIONS OR TEST PAPERS THEREFOR
CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL ORENZYMOLOGICAL PROCESSES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ENZYMOLOGY
MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEICACIDS OR MICROORGANISMS
METALLURGY
MICROBIOLOGY
MUTATION OR GENETIC ENGINEERING
PROCESSES OF PREPARING SUCH COMPOSITIONS
SEMICONDUCTOR DEVICES
SPIRITS
VINEGAR
WINE
title Technique for forming a passivation layer without a terminal metal
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