Technique for forming a passivation layer without a terminal metal

By determining at least one surface characteristic of a passivation layer stack used for forming a bump structure, the situation after the deposition and patterning of a terminal metal layer stack may be "simulated," thereby providing the potential for using well-established bump manufactu...

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Bibliographische Detailangaben
Hauptverfasser: LEHR MATTHIAS, LETZ TOBIAS, HOHAGE JOERG, KUECHENMEISTER FRANK
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:By determining at least one surface characteristic of a passivation layer stack used for forming a bump structure, the situation after the deposition and patterning of a terminal metal layer stack may be "simulated," thereby providing the potential for using well-established bump manufacturing techniques while nevertheless significantly reducing process complexity by omitting the deposition and patterning of the terminal metal layer stack.