Front opening unified pod with latch structure

A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of sliding devices, let the latch structures can lock or unlock more stabilized, and use sliding rollers res...

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Bibliographische Detailangaben
Hauptverfasser: CHIU MING-LONG, LU SHAO-WEI, HSU TZU-JENG, WANG CHIEN-FENG
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A Front Opening Unified Pod (FOUP) has a pair of latch structures, and the latch structures install in a door of the FOUP. The latch structures use a circular rotary turntable to drive a pair of sliding devices, let the latch structures can lock or unlock more stabilized, and use sliding rollers respectively disposed on the sliding devices to prevent the generation of dusts.