Micro-mechanical component with cantilever integrated electrical functional element

A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply line...

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Bibliographische Detailangaben
Hauptverfasser:	SULZBACH THOMAS, RICHTER CHRISTOPH, ENGL WOLFGANG
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATION INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A micro-mechanical component including a support element and a cantilever with integrated electrical functional element to which at least two electrical supply lines implemented as printed conductors on the cantilever are routed. The invention proposes to arrange at least one each of the supply lines on the two opposite flat surfaces of the cantilever and/or the support element. The functional element is supplied by the first supply line on a first flat surface, with the second supply line on the opposite flat surface serving as return line.