Reducing stored electrical energy in a lead inductance

According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DZIUBA ROBERT, BUGYI RAFAL, KLIMCZAK ANDRZEJ, OZIMEK PAWEL, ZELECHOWSKI MARCIN
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.