Transitioned film growth for conductive semiconductor materials

A center region of conductive material/s may be disposed or "sandwiched" between transition regions of relatively lower conductivity materials to provide substantially low defect density interfaces for the sandwiched material. The center region and surrounding transition regions may in tur...

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Bibliographische Detailangaben
Hauptverfasser: AJMERA SAMEER K, TAYLOR MICHAEL F, SYLLAIOS ATHANASIOS J
Format: Patent
Sprache:eng
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Zusammenfassung:A center region of conductive material/s may be disposed or "sandwiched" between transition regions of relatively lower conductivity materials to provide substantially low defect density interfaces for the sandwiched material. The center region and surrounding transition regions may in turn be disposed or sandwiched between dielectric insulative material to form a sandwiched and transitioned device structure. The center region of such a sandwiched structure may be implemented, for example, as a device layer such as conductive microbolometer layer for a microbolometer detector structure.