Packages and methods for packaging using a lid having multiple conductive layers

Packaged integrated devices and methods of forming the same are provided. In one embodiment, a packaged integrated device includes a package substrate, a package lid, and an integrated circuit or microelectromechanical systems (MEMS) device. The package lid is mounted to a first surface of the packa...

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Bibliographische Detailangaben
Hauptverfasser: SULLIVAN RICK, GAO JIA, GOIDA THOMAS, YANG JICHENG, CHOWDHURY ASIF, TIONGSON CARLO, SENGUPTA DIPAK, MENA MANOLO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Packaged integrated devices and methods of forming the same are provided. In one embodiment, a packaged integrated device includes a package substrate, a package lid, and an integrated circuit or microelectromechanical systems (MEMS) device. The package lid is mounted to a first surface of the package substrate using an epoxy, and the package lid and the package substrate define a package interior. The package lid includes an interior coating suited to good adhesion with the epoxy, and an exterior coating suited to RF shielding, where the materials of the interior and exterior coatings are different. In one example, the interior lid coating is nickel whereas the exterior lid coating is tin.