Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α, -unsaturated esters. The fluoroalkanol-substituted α, -unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic pho...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α, -unsaturated esters. The fluoroalkanol-substituted α, -unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors. |
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