Semiconductor device having a liquid cooling module

A semiconductor device comprises a mounting substrate, a semiconductor element provided above said mounting substrate, a package substrate provided above said mounting substrate with said semiconductor element therebetween and electrically connected to said semiconductor element via a primary connec...

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Bibliographische Detailangaben
Hauptverfasser: TENMEI HIROYUKI, UCHIYAMA SHIRO, IKEDA HIROAKI, NAKA YASUHIRO, NISHI KUNIHIKO, OSONE YASUO, OHASHI SHIGEO, ISHINO MASAKAZU, MIYAKE HIDEHARU, HISANO NAE
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device comprises a mounting substrate, a semiconductor element provided above said mounting substrate, a package substrate provided above said mounting substrate with said semiconductor element therebetween and electrically connected to said semiconductor element via a primary connecting bump, a liquid cooling module cooling said semiconductor element by a liquid refrigerant, in which a heat receiving section of the liquid cooling module is disposed between said semiconductor element and said mounting substrate, and a plurality of secondary connecting bumps provided between said package substrate and said mounting substrate.