Fuse chambers on a substrate

Embodiments of a system with first means for forming a chamber adjacent to a component formed on a substrate and a single orifice between the chamber and a first surface of the first means that is opposite a second surface of the first means adjacent to the substrate and second means for enclosing t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MACKENZIE MARK H, LEONARD CHRISTOPHER A, COX JULIE J, PHILLIPS ANDREW, DONALDSON JEREMY H
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Embodiments of a system with first means for forming a chamber adjacent to a component formed on a substrate and a single orifice between the chamber and a first surface of the first means that is opposite a second surface of the first means adjacent to the substrate and second means for enclosing the chamber on at least a portion of the first surface that encompasses the single orifice are disclosed.