Light source device and method for generating extreme ultraviolet light
A light source device repeatedly implements a first state and a second state in alternate shifts. The energy of a standing wave generated in a cavity resonator is absorbed by a rare gas or the like existing in a hollow member. This implements the first state in which plasma is generated and the elec...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A light source device repeatedly implements a first state and a second state in alternate shifts. The energy of a standing wave generated in a cavity resonator is absorbed by a rare gas or the like existing in a hollow member. This implements the first state in which plasma is generated and the electron temperature thereof is increased, and then the extreme ultraviolet light emitted from the plasma is emitted out of the cavity resonator through a window. The supply of the electromagnetic wave to the cavity resonator is interrupted. This implements the second state in which the plasma is extinguished. |
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