Enhancing accuracy of fast high-resolution X-ray diffractometry

Enhancing accuracy of fast high-resolution X-ray diffractometry

A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is co...

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Bibliographische Detailangaben
Hauptverfasser: KROHMAL ALEXANDER, WORMINGTON MATTHEW, OPENGANDEN GENNADY, BERMAN DAVID
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.