MEMS accelerometer using capacitive sensing and production method thereof

A MEMS accelerometer uses capacitive sensing between two electrode layers. One of the electrode layers has at least four independent electrodes arranged as two pairs of electrodes, with one pair aligned orthogonally to the other such that tilting of the membrane can be detected as well as normal-dir...

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Bibliographische Detailangaben
Hauptverfasser:	BOMINAAR-SILKENS IRIS, LANGEREIS GEERT, VAN LIPPEN TWAN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS PUBLIC ADDRESS SYSTEMS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A MEMS accelerometer uses capacitive sensing between two electrode layers. One of the electrode layers has at least four independent electrodes arranged as two pairs of electrodes, with one pair aligned orthogonally to the other such that tilting of the membrane can be detected as well as normal-direction movement of the membrane. In this way, a three axis accelerometer can be formed from a single suspended mass, and by sensing using a set of capacitor electrodes which are all in the same plane. This means the fabrication is simple and is compatible with other MEMS manufacturing processes, such as MEMS microphones.