Mold structures, and method of transfer of fine structures

A mold and a pattern transfer method using the same for a nanoprinting technology. The mold can be released from a substrate accurately and easily. The mold, which is used for forming a fine pattern on a substrate using a press machine, comprises a release mechanism.

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Bibliographische Detailangaben
Hauptverfasser:	MOTOWAKI SIGEHISA, KUWABARA KOSUKE, OGINO MASAHIKO, MIYAUCHI AKIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING AGRICULTURE ANIMAL HUSBANDRY BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FISHING FORESTRY HUMAN NECESSITIES HUNTING INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER LINING MACHINES MANUFACTURE BY DRY PROCESSES OF ARTICLES, WITH OR WITHOUTORGANIC BINDING AGENTS, MADE FROM PARTICLES OR FIBRES CONSISTINGOF WOOD OR OTHER LIGNOCELLULOSIC OR LIKE ORGANIC MATERIAL MANUFACTURE OF DAIRY PRODUCTS MICROSTRUCTURAL TECHNOLOGY NAILING OR STAPLING MACHINES IN GENERAL PERFORMING OPERATIONS PHYSICS PRINTING PROCESSES FOR THE MANUFACTURE OR REPRODUCTION OF PRINTINGSURFACES PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURESCONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS STAMPS TRANSPORTING TRAPPING TYPEWRITERS WORKING CEMENT, CLAY, OR STONE WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL WORKING OR PRESERVING WOOD OR SIMILAR MATERIAL
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Beschreibung
Zusammenfassung:	A mold and a pattern transfer method using the same for a nanoprinting technology. The mold can be released from a substrate accurately and easily. The mold, which is used for forming a fine pattern on a substrate using a press machine, comprises a release mechanism.