Immobilizing device and immobilization method using the immobilization device

Provided is an immobilization device for fitting a connecting member of a chip and a connecting member of a cover together, where a spatial clearance between the chip and cover is small. The immobilization device includes a substrate (102), a cover means (101) including a fitting means to fit with a...

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Bibliographische Detailangaben
Hauptverfasser: ASOGAWA MINORU, KOCHI HAYATARO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Provided is an immobilization device for fitting a connecting member of a chip and a connecting member of a cover together, where a spatial clearance between the chip and cover is small. The immobilization device includes a substrate (102), a cover means (101) including a fitting means to fit with a chip (103) placed on the substrate (102), a rotating arm means (201) rotatably joined to a first joining means (301) of the substrate (102) and to a second joining means (302) of the cover means (101), and a parallel maintaining means (203) for fitting the fitting means and the chip (103) together with the fitting means and the chip (103) maintained in substantially parallel by the first joining means (301) or the second joining means (302) moving along a chip surface or a plane parallel to the chip surface. The fitting means rotates freely against the chip (103).