Apparatus for producing a charged particle beam

Apparatus for the production of a charged particle beam, comprising: an ion source plasma chamber (104), having a door (106), and an accelerator (102) mounted on the face of the door remote from the ion source plasma chamber.

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Bibliographische Detailangaben
Hauptverfasser: HOLMES TIMOTHY ANDREW JAMES, DAVIS MERVYN HOWARD
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Apparatus for the production of a charged particle beam, comprising: an ion source plasma chamber (104), having a door (106), and an accelerator (102) mounted on the face of the door remote from the ion source plasma chamber.