Lithographic apparatus and device manufacturing method

An immersion lithographic apparatus comprising a surface which is curved such that a surface-tension drainage force acts in a direction on a film of immersion liquid on the surface.

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Bibliographische Detailangaben
Hauptverfasser:	MIRANDA MARCIO ALEXANDRE CANO, JANSEN HANS, BRUIJSTENS JEROEN PETER JOHANNES, TANASA GHEORGHE, THOMAS IVO ADAM JOHANNES, JACOBS JOHANNES HENRICUS WILHELMUS, KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY PHOTOGRAPHY PHYSICS
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Beschreibung
Zusammenfassung:	An immersion lithographic apparatus comprising a surface which is curved such that a surface-tension drainage force acts in a direction on a film of immersion liquid on the surface.